Gas for electronics
Gases used in semiconductor industry are collectively referred to as electronic gases.
No. |
Product |
Purity |
Net Weight |
Cylinder |
Walve |
1 |
Octafluorocyclobutane C4F8 |
5N |
45KG |
DOT43.3L |
DISS716 |
2 |
Trifluoromethane CHF3 |
5N |
30KG |
DOT47L |
DISS716 |
3 |
Difluoromethane CH2F2 |
5N |
30KG |
DOT47L |
DISS724 |
4 |
Methyl Fluoride CH3F |
5N |
5KG |
DOT47L |
DISS724 |
5 |
Hexafluoropropene C3F6 |
5N |
40KG |
GB40L |
QF-90A |
6 |
Hexafluoroethane C2F6 |
5N |
40KG |
DOT47L |
DISS716 |
7 |
Pentafluoroethane C2HF5 |
5N |
40KG |
DOT47L |
DISS716 |
8 |
Hexafluorobutadiene C4F6 |
5N |
40KG |
DOT47L |
DISS724 |
